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Micro- and nanosystems technology is a new rapidly developing direction, which aims to develop miniature systems and devices using nanotechnology and nanomaterials. Among them: analytical micro- and nanosystems for various purposes on microchips; micromechanical, thermoelectric, optical, chemical and biological sensors; ultra miniature motors and micropumps in integral design;micro- and nano-manipulators, microrobots.

The basic departments for this direction are: 

-Department of "Semiconductor Physics and Optoelectronics"; 

-Department of Solid State Electronics.

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